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Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy

Low voltage x-ray microanalysis, defined as being performed with an incident beam energy ≤5 keV, can achieve spatial resolution, laterally and in depth, of 100 nm or less, depending on the exact selection of beam energy and the composition of the target. The shallow depth of beam penetration, with t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Veröffentlicht in:J Res Natl Inst Stand Technol
1. Verfasser: Newbury, Dale E.
Format: Artigo
Sprache:Inglês
Veröffentlicht: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 2002
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4863847/
https://ncbi.nlm.nih.gov/pubmed/27446755
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.107.049
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