Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different locations of pitches in the mask to make a consiste...

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Udgivet i:Sensors (Basel)
Main Authors: Ren, Dongxu, Zhao, Huiying, Zhang, Chupeng, Yuan, Daocheng, Xi, Jianpu, Zhu, Xueliang, Ban, Xinxing, Dong, Longchao, Gu, Yawen, Jiang, Chunye
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2016
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Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4851052/
https://ncbi.nlm.nih.gov/pubmed/27089348
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16040538
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