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Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect
A multi-repeated photolithography method for manufacturing an incremental linear scale using projection lithography is presented. The method is based on the average homogenization effect that periodically superposes the light intensity of different locations of pitches in the mask to make a consiste...
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| Publicado no: | Sensors (Basel) |
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| Main Authors: | , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4851052/ https://ncbi.nlm.nih.gov/pubmed/27089348 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16040538 |
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