Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect

Por Ren, Dongxu, Zhao, Huiying, Zhang, Chupeng, Yuan, Daocheng, Xi, Jianpu, Zhu, Xueliang, Ban, Xinxing, Dong, Longchao, Gu, Yawen, Jiang, Chunye
Publicado no Sensors (Basel) (2016)