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Temperature-Dependent Nanofabrication on Silicon by Friction-Induced Selective Etching
Friction-induced selective etching provides a convenient and practical way for fabricating protrusive nanostructures. A further understanding of this method is very important for establishing a controllable nanofabrication process. In this study, the effect of etching temperature on the formation of...
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| Publié dans: | Nanoscale Res Lett |
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| Auteurs principaux: | , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Springer US
2016
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4848285/ https://ncbi.nlm.nih.gov/pubmed/27119157 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1438-1 |
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