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High mobility and high stability glassy metal-oxynitride materials and devices

In thin film technology, future semiconductor and display products with high performance, high density, large area, and ultra high definition with three-dimensional functionalities require high performance thin film transistors (TFTs) with high stability. Zinc oxynitride, a composite of zinc oxide a...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Lee, Eunha, Kim, Taeho, Benayad, Anass, Hur, Jihyun, Park, Gyeong-Su, Jeon, Sanghun
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4820723/
https://ncbi.nlm.nih.gov/pubmed/27044371
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep23940
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