Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist

This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...

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Salvato in:
Dettagli Bibliografici
Pubblicato in:Nanoscale Res Lett
Autori principali: Dan’ko, Viktor, Dmitruk, Mykola, Indutnyi, Ivan, Mamykin, Sergii, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro, Lytvyn, Petro
Natura: Artigo
Lingua:Inglês
Pubblicazione: Springer US 2015
Soggetti:
Nano Express
Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/
https://ncbi.nlm.nih.gov/pubmed/26714859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x
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