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Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist
This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...
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| Publicado en: | Nanoscale Res Lett |
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| Autores principales: | , , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Springer US
2015
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/ https://ncbi.nlm.nih.gov/pubmed/26714859 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x |
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