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Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist
This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...
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| Publicado no: | Nanoscale Res Lett |
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| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer US
2015
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/ https://ncbi.nlm.nih.gov/pubmed/26714859 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x |
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