Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist

This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...

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Bibliografiske detaljer
Udgivet i:Nanoscale Res Lett
Main Authors: Dan’ko, Viktor, Dmitruk, Mykola, Indutnyi, Ivan, Mamykin, Sergii, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro, Lytvyn, Petro
Format: Artigo
Sprog:Inglês
Udgivet: Springer US 2015
Fag:
Nano Express
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/
https://ncbi.nlm.nih.gov/pubmed/26714859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x
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