Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist

This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...

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發表在:Nanoscale Res Lett
Main Authors: Dan’ko, Viktor, Dmitruk, Mykola, Indutnyi, Ivan, Mamykin, Sergii, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro, Lytvyn, Petro
格式: Artigo
語言:Inglês
出版: Springer US 2015
主題:
Nano Express
在線閱讀:https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/
https://ncbi.nlm.nih.gov/pubmed/26714859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x
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