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Fabrication of Periodic Plasmonic Structures Using Interference Lithography and Chalcogenide Photoresist

This study reports on the employment of the interference lithography (IL) technique, using photoresist based on the chalcogenide glass (ChG) films, for fabrication of one-dimensional (gratings) and two-dimensional (arrays) periodic plasmonic structures on the surface of glass plates. The IL techniqu...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Dan’ko, Viktor, Dmitruk, Mykola, Indutnyi, Ivan, Mamykin, Sergii, Myn’ko, Victor, Lukaniuk, Mariia, Shepeliavyi, Petro, Lytvyn, Petro
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4695465/
https://ncbi.nlm.nih.gov/pubmed/26714859
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-1203-x
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