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Silicon nanocrystal growth under irradiation of electron beam

In our experiment, it was observed that silicon nanocrystal rapidly grows with irradiation of electron beam on amorphous silicon film prepared by pulsed laser deposition, and shape of silicon nanocrystal is usually sphere in smaller nanoscale with less exposure time under electron beam, in which the...

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Bibliographic Details
Published in:Sci Rep
Main Authors: Huang, Wei-Qi, Liu, Shi-Rong, Huang, Zhong-Mei, Dong, Tai-Ge, Wang, Gang, Qin, Cao-Jian
Format: Artigo
Language:Inglês
Published: Nature Publishing Group 2015
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4660392/
https://ncbi.nlm.nih.gov/pubmed/26608069
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep16682
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