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Silicon nanocrystal growth under irradiation of electron beam

In our experiment, it was observed that silicon nanocrystal rapidly grows with irradiation of electron beam on amorphous silicon film prepared by pulsed laser deposition, and shape of silicon nanocrystal is usually sphere in smaller nanoscale with less exposure time under electron beam, in which the...

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Библиографические подробности
Опубликовано в: :Sci Rep
Главные авторы: Huang, Wei-Qi, Liu, Shi-Rong, Huang, Zhong-Mei, Dong, Tai-Ge, Wang, Gang, Qin, Cao-Jian
Формат: Artigo
Язык:Inglês
Опубликовано: Nature Publishing Group 2015
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Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC4660392/
https://ncbi.nlm.nih.gov/pubmed/26608069
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep16682
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