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A Summary of Lightpipe Radiation Thermometry Research at NIST
During the last 10 years, research in light-pipe radiation thermometry has significantly reduced the uncertainties for temperature measurements in semiconductor processing. The National Institute of Standards and Technology (NIST) has improved the calibration of lightpipe radiation thermometers (LPR...
Shranjeno v:
| izdano v: | J Res Natl Inst Stand Technol |
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| Glavni avtor: | |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2006
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4654607/ https://ncbi.nlm.nih.gov/pubmed/27274914 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.111.002 |
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