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A Summary of Lightpipe Radiation Thermometry Research at NIST
During the last 10 years, research in light-pipe radiation thermometry has significantly reduced the uncertainties for temperature measurements in semiconductor processing. The National Institute of Standards and Technology (NIST) has improved the calibration of lightpipe radiation thermometers (LPR...
保存先:
| 出版年: | J Res Natl Inst Stand Technol |
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| 第一著者: | |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2006
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4654607/ https://ncbi.nlm.nih.gov/pubmed/27274914 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.111.002 |
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