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A Summary of Lightpipe Radiation Thermometry Research at NIST
During the last 10 years, research in light-pipe radiation thermometry has significantly reduced the uncertainties for temperature measurements in semiconductor processing. The National Institute of Standards and Technology (NIST) has improved the calibration of lightpipe radiation thermometers (LPR...
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| Publicado en: | J Res Natl Inst Stand Technol |
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| Autor principal: | |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2006
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4654607/ https://ncbi.nlm.nih.gov/pubmed/27274914 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.111.002 |
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