Atomically Traceable Nanostructure Fabrication

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomicall...

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Bibliografiset tiedot
Julkaisussa:J Vis Exp
Päätekijät: Ballard, Josh B., Dick, Don D., McDonnell, Stephen J., Bischof, Maia, Fu, Joseph, Owen, James H. G., Owen, William R., Alexander, Justin D., Jaeger, David L., Namboodiri, Pradeep, Fuchs, Ehud, Chabal, Yves J., Wallace, Robert M., Reidy, Richard, Silver, Richard M., Randall, John N., Von Ehr, James
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MyJove Corporation 2015
Aiheet:
Engineering
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC4545154/
https://ncbi.nlm.nih.gov/pubmed/26274555
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3791/52900
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