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Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type
Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors...
Enregistré dans:
| Publié dans: | Sensors (Basel) |
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| Auteurs principaux: | , , , , |
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
MDPI
2015
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4507607/ https://ncbi.nlm.nih.gov/pubmed/26110409 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150614745 |
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