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Nanomechanical humidity detection through porous alumina cantilevers

We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10–22%. The sensitivity of porous anodic aluminium oxide cantil...

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Dettagli Bibliografici
Pubblicato in:Beilstein J Nanotechnol
Autori principali: Boytsova, Olga, Klimenko, Alexey, Lebedev, Vasiliy, Lukashin, Alexey, Eliseev, Andrey
Natura: Artigo
Lingua:Inglês
Pubblicazione: Beilstein-Institut 2015
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC4505083/
https://ncbi.nlm.nih.gov/pubmed/26199836
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.6.137
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