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Nanomechanical humidity detection through porous alumina cantilevers

We present here the behavior of the resonance frequency of porous anodic alumina cantilever arrays during water vapor adsorption and emphasize their possible use in the micromechanical sensing of humidity levels at least in the range of 10–22%. The sensitivity of porous anodic aluminium oxide cantil...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Boytsova, Olga, Klimenko, Alexey, Lebedev, Vasiliy, Lukashin, Alexey, Eliseev, Andrey
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2015
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4505083/
https://ncbi.nlm.nih.gov/pubmed/26199836
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.6.137
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