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Nanomechanical Cantilever Array Sensors
In recent years, mechanics has experienced a revival, as microfabrication technologies and nanotechnology are applied to produce tiny structures. The development of ultraprecise position sensing started three decades ago with a novel imaging technique called atomic force microscopy, which provides u...
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| Publicado no: | Springer Handbook of Nanotechnology |
|---|---|
| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7176243/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/978-3-662-54357-3_15 |
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