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Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

The integration of gas sensor components into smart phones, tablets and wrist watches will revolutionize the environmental health and safety industry by providing individuals the ability to detect harmful chemicals and pollutants in the environment using always-on hand-held or wearable devices. Meta...

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Bibliografische gegevens
Gepubliceerd in:Sensors (Basel)
Hoofdauteurs: Filipovic, Lado, Selberherr, Siegfried
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2015
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4431201/
https://ncbi.nlm.nih.gov/pubmed/25815445
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150407206
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