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Thermo-Electro-Mechanical Simulation of Semiconductor Metal Oxide Gas Sensors
There is a growing demand in the semiconductor industry to integrate many functionalities on a single portable device. The integration of sensor fabrication with the mature CMOS technology has made this level of integration a reality. However, sensors still require calibration and optimization befor...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6695634/ https://ncbi.nlm.nih.gov/pubmed/31357746 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma12152410 |
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