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The nanostructuring of surfaces and films using interference lithography and chalcogenide photoresist
The reversible and transient photostimulated structural changes in annealed chalcogenide glass (ChG) layers were used to form interference periodic structures on semiconductor surfaces and metal films. It was shown that negative-action etchants based on amines dissolve illuminated parts of a chalcog...
Tallennettuna:
| Julkaisussa: | Nanoscale Res Lett |
|---|---|
| Päätekijät: | , , , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
Springer US
2015
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| Aiheet: | |
| Linkit: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4385117/ https://ncbi.nlm.nih.gov/pubmed/25852379 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-015-0765-y |
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