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Print-to-Pattern Dry Film Photoresist Lithography
Here we present facile microfabrication processes, referred to as Print-to-Pattern dry film photoresist (DFP) lithography, that utilize the combined advantages of wax printing and DFP to produce micropatterned substrates with high resolution over a large surface area in a non-cleanroom setting. The...
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| Главные авторы: | , , |
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| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
2014
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| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4128193/ https://ncbi.nlm.nih.gov/pubmed/25125799 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/24/5/057002 |
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