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Design and Fabrication of Interdigital Nanocapacitors Coated with HfO(2)
In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO(2). An analytical solution of the capacitance was compared to electromagnetic simulations using...
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| Udgivet i: | Sensors (Basel) |
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| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2015
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4327113/ https://ncbi.nlm.nih.gov/pubmed/25602271 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s150101998 |
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