Loading...

Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip

The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive f...

Full description

Saved in:
Bibliographic Details
Published in:Sensors (Basel)
Main Authors: Yang, Ming-Zhi, Dai, Ching-Liang, Wu, Chyan-Chyi
Format: Artigo
Language:Inglês
Published: MDPI 2014
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC4279487/
https://ncbi.nlm.nih.gov/pubmed/25353984
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s141120360
Tags: Add Tag
No Tags, Be the first to tag this record!