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Large displacement vertical translational actuator based on piezoelectric thin films
A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead–zirconate–titanat...
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| Publicado no: | J Micromech Microeng |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4262113/ https://ncbi.nlm.nih.gov/pubmed/25506130 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/20/7/075016 |
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