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Large Stroke Vertical PZT Microactuator With High-Speed Rotational Scanning
A thin-film piezoelectric microactuator using a novel combination of active vertical translational scanning and passive resonant rotational scanning is presented. Thin-film lead-zirconate-titanate unimorph bending beams surrounding a central platform provide nearly 200-μm displacement at 18 V with b...
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| Publicat a: | J Microelectromech Syst |
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| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2014
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4262091/ https://ncbi.nlm.nih.gov/pubmed/25506187 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2014.2303643 |
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