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CMUTs with High-K Atomic Layer Deposition Dielectric Material Insulation Layer
Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. T...
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| Publicat a: | IEEE Trans Ultrason Ferroelectr Freq Control |
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| Autors principals: | , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2014
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4258900/ https://ncbi.nlm.nih.gov/pubmed/25474786 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2014.006481 |
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