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CMUTs with High-K Atomic Layer Deposition Dielectric Material Insulation Layer

Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. T...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Argitaratua izan da:IEEE Trans Ultrason Ferroelectr Freq Control
Egile Nagusiak: Xu, Toby, Tekes, Coskun, Degertekin, F. Levent
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: 2014
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC4258900/
https://ncbi.nlm.nih.gov/pubmed/25474786
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2014.006481
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