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CMUTs with High-K Atomic Layer Deposition Dielectric Material Insulation Layer
Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. T...
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| Publicado no: | IEEE Trans Ultrason Ferroelectr Freq Control |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4258900/ https://ncbi.nlm.nih.gov/pubmed/25474786 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2014.006481 |
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