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Repeatable change in electrical resistance of Si surface by mechanical and electrical nanoprocessing
The properties of mechanically and electrically processed silicon surfaces were evaluated by atomic force microscopy (AFM). Silicon specimens were processed using an electrically conductive diamond tip with and without vibration. After the electrical processing, protuberances were generated and the...
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| Publicat a: | Nanoscale Res Lett |
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| Autors principals: | , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Springer
2014
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4256973/ https://ncbi.nlm.nih.gov/pubmed/25489276 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-455 |
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