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Repeatable change in electrical resistance of Si surface by mechanical and electrical nanoprocessing
The properties of mechanically and electrically processed silicon surfaces were evaluated by atomic force microscopy (AFM). Silicon specimens were processed using an electrically conductive diamond tip with and without vibration. After the electrical processing, protuberances were generated and the...
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| Publicado no: | Nanoscale Res Lett |
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| Main Authors: | , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4256973/ https://ncbi.nlm.nih.gov/pubmed/25489276 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-455 |
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