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Fabrication of uniform 4H-SiC mesopores by pulsed electrochemical etching

In this letter, the uniform 4H silicon carbide (SiC) mesopores was fabricated by pulsed electrochemical etching method. The length of the mesopores is about 19 μm with a diameter of about 19 nm. The introduction of pause time (T(off)) is crucial to form the uniform 4H-SiC mesopores. The pore diamete...

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書誌詳細
主要な著者: Tan, Jia-Hui, Chen, Zhi-zhan, Lu, Wu-Yue, Cheng, Yue, He, Hong, Liu, Yi-Hong, Sun, Yu-Jun, Zhao, Gao-Jie
フォーマット: Artigo
言語:Inglês
出版事項: Springer 2014
主題:
オンライン・アクセス:https://ncbi.nlm.nih.gov/pmc/articles/PMC4198072/
https://ncbi.nlm.nih.gov/pubmed/25324708
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-570
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