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Macroporous silicon for high-capacitance devices using metal electrodes
In this paper, high-capacity energy storage devices based on macroporous silicon are demonstrated. Small footprint devices with large specific capacitances up to 100 nF/mm(2), and an absolute capacitance above 15 μF, have been successfully fabricated using standard microelectronics and MEMS techniqu...
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| 主要な著者: | , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Springer
2014
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4165801/ https://ncbi.nlm.nih.gov/pubmed/25242906 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-473 |
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