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Fabrication of high-quality single-crystal Cu thin films using radio-frequency sputtering
Copper (Cu) thin films have been widely used as electrodes and interconnection wires in integrated electronic circuits, and more recently as substrates for the synthesis of graphene. However, the ultra-high vacuum processes required for high-quality Cu film fabrication, such as molecular beam epitax...
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| Main Authors: | , , , , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4148649/ https://ncbi.nlm.nih.gov/pubmed/25169804 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep06230 |
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