Fabrication of high-quality single-crystal Cu thin films using radio-frequency sputtering

Copper (Cu) thin films have been widely used as electrodes and interconnection wires in integrated electronic circuits, and more recently as substrates for the synthesis of graphene. However, the ultra-high vacuum processes required for high-quality Cu film fabrication, such as molecular beam epitax...

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Main Authors: Lee, Seunghun, Kim, Ji Young, Lee, Tae-Woo, Kim, Won-Kyung, Kim, Bum-Su, Park, Ji Hun, Bae, Jong-Seong, Cho, Yong Chan, Kim, Jungdae, Oh, Min-Wook, Hwang, Cheol Seong, Jeong, Se-Young
Format: Artigo
Jezik:Inglês
Izdano: Nature Publishing Group 2014
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Article
Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC4148649/
https://ncbi.nlm.nih.gov/pubmed/25169804
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep06230
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