Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering

Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phas...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Kim, Sung Hyun, Kim, Cheol Hwan, Choi, Woo Jin, Lee, Tae Gon, Cho, Seong Keun, Yang, Yong Suk, Lee, Jae Heung, Lee, Sang-Jin
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5431166/
https://ncbi.nlm.nih.gov/pubmed/28469153
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-01472-2
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