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Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth
Sintered porous silicon is a well-known seed for homo-epitaxy that enables fabricating transferrable monocrystalline foils. The crystalline quality of these foils depends on the surface roughness and the strain of this porous seed, which should both be minimized. In order to provide guidelines for a...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4128828/ https://ncbi.nlm.nih.gov/pubmed/25136277 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-348 |
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