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Nanostructured silicon membranes for control of molecular transport
A membrane that allows selective transport of molecular species requires precise engineering on the nanoscale. Membrane permeability can be tuned by controlling the physical structure and surface chemistry of the pores. Here, a combination of electron beam and optical lithography, along with cryogen...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
American Vacuum Society
2010
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4043179/ https://ncbi.nlm.nih.gov/pubmed/24932436 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1116/1.3518911 |
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