Загрузка...
Fabrication of Thin-Film LAPS with Amorphous Silicon
To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous...
Сохранить в:
| Главные авторы: | , , , , |
|---|---|
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
Molecular Diversity Preservation International (MDPI)
2004
|
| Предметы: | |
| Online-ссылка: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4008868/ https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s041000163 |
| Метки: |
Добавить метку
Нет меток, Требуется 1-ая метка записи!
|