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Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By u...
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| Hoofdauteurs: | , , , , , , , |
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| Formaat: | Artigo |
| Taal: | Inglês |
| Gepubliceerd in: |
Nature Publishing Group
2014
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| Onderwerpen: | |
| Online toegang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3983593/ https://ncbi.nlm.nih.gov/pubmed/24722521 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep04662 |
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