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A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

We have recently presented an integrated silicon-glass opto-chemical sensor for lab-on-chip applications, based on porous silicon and anodic bonding technologies. In this work, we have optically characterized the sensor response on exposure to vapors of several organic compounds by means of reflecti...

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Bibliografske podrobnosti
Main Authors: De Stefano, Luca, Malecki, Krzysztof, Della Corte, Francesco G., Moretti, Luigi, Rea, Ilaria, Rotiroti, Lucia, Rendina, Ivo
Format: Artigo
Jezik:Inglês
Izdano: Molecular Diversity Preservation International (MDPI) 2006
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Online dostop:https://ncbi.nlm.nih.gov/pmc/articles/PMC3874676/
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