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A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

We have recently presented an integrated silicon-glass opto-chemical sensor for lab-on-chip applications, based on porous silicon and anodic bonding technologies. In this work, we have optically characterized the sensor response on exposure to vapors of several organic compounds by means of reflecti...

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Bibliographic Details
Main Authors: De Stefano, Luca, Malecki, Krzysztof, Della Corte, Francesco G., Moretti, Luigi, Rea, Ilaria, Rotiroti, Lucia, Rendina, Ivo
Format: Artigo
Language:Inglês
Published: Molecular Diversity Preservation International (MDPI) 2006
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3874676/
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