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Electron beam induced local crystallization of HfO(2) nanopores for biosensing applications
We report the development of single, locally crystallized nanopores in HfO(2) membranes for biosensing applications. HfO(2) is chosen for its isoelectric point of 7.0, mechanical and chemical stability in solution, and for its potential as a high-k material for nanopore ionic field effect transistor...
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| Hauptverfasser: | , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
2013
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3867606/ https://ncbi.nlm.nih.gov/pubmed/23945603 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c3nr02608f |
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