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Electron beam induced local crystallization of HfO(2) nanopores for biosensing applications

We report the development of single, locally crystallized nanopores in HfO(2) membranes for biosensing applications. HfO(2) is chosen for its isoelectric point of 7.0, mechanical and chemical stability in solution, and for its potential as a high-k material for nanopore ionic field effect transistor...

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Bibliografiske detaljer
Main Authors: Shim, Jiwook, Rivera, Jose, Bashir, Rashid
Format: Artigo
Sprog:Inglês
Udgivet: 2013
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3867606/
https://ncbi.nlm.nih.gov/pubmed/23945603
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1039/c3nr02608f
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