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Retrospective sputter depth profiling using 3D mass spectral imaging

A molecular multilayer stack composed of alternating Langmuir-Blodgett films was analyzed by ToF-SIMS imaging in combination with intermediate sputter erosion using a focused C(60)(+) cluster ion beam. From the resulting dataset, depth profiles of any desired lateral portion of the analyzed field-of...

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Detalles Bibliográficos
Main Authors: Zheng, Leiliang, Wucher, Andreas, Winograd, Nicholas
Formato: Artigo
Idioma:Inglês
Publicado: 2011
Assuntos:
Acceso en liña:https://ncbi.nlm.nih.gov/pmc/articles/PMC3863432/
https://ncbi.nlm.nih.gov/pubmed/24347744
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1002/sia.3509
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