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An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the...

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Détails bibliographiques
Auteurs principaux: Liang, Jinxing, Huang, Jia, Zhang, Tian, Zhang, Jing, Li, Xuefeng, Ueda, Toshitsugu
Format: Artigo
Langue:Inglês
Publié: MDPI 2013
Sujets:
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3821337/
https://ncbi.nlm.nih.gov/pubmed/24025559
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130912140
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