Composition-dependent structure of polycrystalline magnetron-sputtered V–Al–C–N hard coatings studied by XRD, XPS, XANES and EXAFS

V–Al–C–N hard coatings with high carbon content were deposited by reactive radio-frequency magnetron sputtering using an experimental combinatorial approach, deposition from a segmented sputter target. The composition-dependent coexisting phases within the coating were analysed using the complementa...

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Главные авторы: Krause, Bärbel, Darma, Susan, Kaufholz, Marthe, Mangold, Stefan, Doyle, Stephen, Ulrich, Sven, Leiste, Harald, Stüber, Michael, Baumbach, Tilo
Формат: Artigo
Язык:Inglês
Опубликовано: International Union of Crystallography 2013
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Research Papers
Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC3769060/
https://ncbi.nlm.nih.gov/pubmed/24046506
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S0021889813014477
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