Metal silicide/poly-Si Schottky diodes for uncooled microbolometers

Nickel silicide Schottky diodes formed on polycrystalline Si 〈P〉 films are proposed as temperature sensors of monolithic uncooled microbolometer infrared focal plane arrays. The structure and composition of nickel silicide/polycrystalline silicon films synthesized in a low-temperature process are ex...

Deskribapen osoa

Gorde:
Xehetasun bibliografikoak
Egile Nagusiak: Chizh, Kirill V, Chapnin, Valery A, Kalinushkin, Victor P, Resnik, Vladimir Y, Storozhevykh, Mikhail S, Yuryev, Vladimir A
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: Springer 2013
Gaiak:
Nano Express
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC3655036/
https://ncbi.nlm.nih.gov/pubmed/23594606
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-177
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