Metal silicide/poly-Si Schottky diodes for uncooled microbolometers

Nickel silicide Schottky diodes formed on polycrystalline Si 〈P〉 films are proposed as temperature sensors of monolithic uncooled microbolometer infrared focal plane arrays. The structure and composition of nickel silicide/polycrystalline silicon films synthesized in a low-temperature process are ex...

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Détails bibliographiques
Auteurs principaux: Chizh, Kirill V, Chapnin, Valery A, Kalinushkin, Victor P, Resnik, Vladimir Y, Storozhevykh, Mikhail S, Yuryev, Vladimir A
Format: Artigo
Langue:Inglês
Publié: Springer 2013
Sujets:
Nano Express
Accès en ligne:https://ncbi.nlm.nih.gov/pmc/articles/PMC3655036/
https://ncbi.nlm.nih.gov/pubmed/23594606
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-177
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