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Metal silicide/poly-Si Schottky diodes for uncooled microbolometers
Nickel silicide Schottky diodes formed on polycrystalline Si 〈P〉 films are proposed as temperature sensors of monolithic uncooled microbolometer infrared focal plane arrays. The structure and composition of nickel silicide/polycrystalline silicon films synthesized in a low-temperature process are ex...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3655036/ https://ncbi.nlm.nih.gov/pubmed/23594606 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-177 |
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