Metal silicide/poly-Si Schottky diodes for uncooled microbolometers

Nickel silicide Schottky diodes formed on polycrystalline Si 〈P〉 films are proposed as temperature sensors of monolithic uncooled microbolometer infrared focal plane arrays. The structure and composition of nickel silicide/polycrystalline silicon films synthesized in a low-temperature process are ex...

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Autors principals: Chizh, Kirill V, Chapnin, Valery A, Kalinushkin, Victor P, Resnik, Vladimir Y, Storozhevykh, Mikhail S, Yuryev, Vladimir A
Format: Artigo
Idioma:Inglês
Publicat: Springer 2013
Matèries:
Nano Express
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC3655036/
https://ncbi.nlm.nih.gov/pubmed/23594606
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-177
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