A carregar...

Si nanopatterning by reactive ion etching through an on-chip self-assembled porous anodic alumina mask

ABSTRACT: We report on Si nanopatterning through an on-chip self-assembled porous anodic alumina (PAA) masking layer using reactive ion etching based on fluorine chemistry. Three different gases/gas mixtures were investigated: pure SF(6), SF(6)/O(2), and SF(6)/CHF(3). For the first time, a systemati...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Main Authors: Gianneta, Violetta, Olziersky, Antonis, Nassiopoulou, Androula G
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2013
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3605172/
https://ncbi.nlm.nih.gov/pubmed/23402551
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-8-71
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!