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Lamb Waves Propagation along 3C-SiC/AlN Membranes for Application in Temperature-Compensated, High-Sensitivity Gravimetric Sensors

The propagation of the fundamental quasi-symmetric Lamb mode S(0) travelling along 3C-SiC/c-AlN composite plates is theoretically studied with respect to the AlN and SiC film thickness, the acoustic wave propagation direction and the electrical boundary conditions. The temperature effects on the pha...

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Detalhes bibliográficos
Main Authors: Caliendo, Cinzia, D'Amico, Arnaldo, Castro, Fabio Lo
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2013
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3574690/
https://ncbi.nlm.nih.gov/pubmed/23282585
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s130100550
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